WILMINGTON, Mass. (AP) — WILMINGTON, Mass. (AP) — Onto Innovation Inc. (ONTO) on Thursday reported fourth-quarter net income of $10.5 million.

The Wilmington, Massachusetts-based company said it had profit of 21 cents per share. Earnings, adjusted for one-time gains and costs, were $1.26 per share.

The results missed Wall Street expectations. The average estimate of four analysts surveyed by Zacks Investment Research was for earnings of $1.28 per share.

The maker of semiconductor manufacturing equipment posted revenue of $266.9 million in the period, which beat Street forecasts. Four analysts surveyed by Zacks expected $266.6 million.

For the year, the company reported profit of $136.8 million, or $2.78 per share. Revenue was reported as $1.01 billion.

For the current quarter ending in March, Onto Innovation expects its per-share earnings to range from $1.26 to $1.36.

The company said it expects revenue in the range of $275 million to $285 million for the fiscal first quarter.

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This story was generated by Automated Insights (http://automatedinsights.com/ap) using data from Zacks Investment Research. Access a Zacks stock report on ONTO at https://www.zacks.com/ap/ONTO